Optical diagnostics of the magnetron sputtering process of copper in an argon–oxygen atmosphere

A. Rydosz, K. Kollbek, Nhu-Tarnawska H. Kim-Ngan, A. Czapla, A. Brudnik
J Mater Sci: Mater Electron 31, 11624 (2020)
tekst: https://doi.org/10.1007/s10854-020-03713-z
linia badawcza: VII